This page provides an overview of subtopics that are central to subpart I reporting:

• Subpart I Technology Assessment Report
• Subpart I Abatement System Supplier Documentation
• Subpart I Fab Information
• Subpart I Greenhouse Gas Emissions Information
• Subpart Validation Report

The end of the page includes links you can use for more information on topics related to subpart I reporting. 

Subpart I Technology Assessment Report

The technology assessment report is a mechanism for collecting information on changes in the semiconductor industry that potentially affect emissions and that therefore may require updating of default gas utilization rates and by-product formation rates, as well as default abatement system DRE values.  To reduce burden, multiple semiconductor manufacturing facilities (regardless of whether they are owned by the same parent company) may submit a single consolidated 3-year report, as long as each company represented is identified in the report. (In this case, each facility must submit its own copy of the consolidated report through e-GGRT.) There is no required form or format for the report except that the report must fulfill the requirements of 40 CFR 98.96(y). The report may include files in any common format, including, for example, Word, pdf, and Excel (e.g., for data supporting the description of technology changes and their impact on emissions).

If you are required to submit a technology assessment report in a specific reporting year, the first section of the Subpart I reporting module will provided a section for you upload your report as shown in the screen image below.  If your facility is not required to submit technology assessment report in a particular reporting year the first section of the reporting page will address Abatement System Supplier Documentation as shown in the next section.

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Subpart I Abatement System Supplier Documentation

If you use default destruction or removal efficiency values in your emissions calculations under 98.93(a), (b), or (i), you must provide abatement system supplier documentation stating that the system was designed for fluorinated GHG or N₂O abatement, as applicable. The documentation must be uploaded on the Subpart I Overview page as a PDF or Word file. You will do this now at the beginning so you can later link to these files as you fill out the part of the web form dealing with abatement systems without having to exit the web form.

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For detailed instructions see Subpart I Abatement System Supplier Documentation.

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Subpart I Fab Information

Subpart I facilities are required to report the following information for each fab:

• Fab name, types of products manufactured, methods used to calculate f-GHG emissions, and whether the fab uses abatement systems.
• Identity of the f-GHGs emitted by the fab
• Identity of the fluorinated heat transfer fluids (f-HTFs) that must be reported for the fab
• N₂O information (if applicable)
• Detailed information about abatement systems used (if applicable)
• Detailed information about stack systems used if stack testing method is used to estimate emissions
• Additional detailed information about the fab, including diameter of wafers manufactured, annual manufacturing capacity and actual annual production, if emissions are associated with R&D activities, effective fab-wide destruction or removal efficiency (if abatement systems are used and if abatement is claimed), and the methods used to apportion f-GHG and N₂O consumption between fabs.

 

For detailed instructions see Subpart I Fab Information.

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Subpart I Greenhouse Gas Emissions Information

Subpart I facilities are required to report for each fab the emissions of f-GHGs, f-HTFs, and N₂O from electronics manufacturing processes that use these substances. 

For detailed instructions see Subpart I Greenhouse Gas Emissions Information.

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Subpart Validation Report

The Validation Report assists you with determining the completeness and quality of your reported data.

We strongly encourage you to use the Validation Report to check your work. The Validation Report performs two types of checks:

• Data Completeness: Data required for reporting that are missing or incomplete.
• Data Quality: Data that are outside of the expected range of values.

Certain validation checks which are considered to represent critical errors must be corrected before you can successfully generate and submit your Annual Report. These checks are signified with a stop sign . If you feel that you have triggered one of these critical “stop signs” checks in error, or if there’s a reason why your report should be submitted despite the check being triggered, please submit a request to the e-GGRT Help Desk at GHGReporting@epa.gov.

You may view the Validation Report at any time.

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See Also

Screen Errors
Using e-GGRT to Prepare Your Subpart I Report
Subpart I Abatement System Supplier Documentation
Subpart I Fab Information
Subpart I Greenhouse Gas Emissions Information
Optional Subpart I Calculation Spreadsheet
Subpart Validation Report 

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