Subpart I Greenhouse Gas Emissions Information
Subpart I facilities are required to report for each fab the emissions of f-GHGs, f-HTFs, and N2O from electronics manufacturing processes that use these substances.

This page provides step-by-step instructions for entering GHG emissions for a fab, for each GHG entered earlier, including f-GHG, N2O, and f-HTF.

Step 1. Open the GHG Emissions Page for a Fab

From the Subpart I Overview page, click on the OPEN button in the FABS table for the fab for which you want to enter GHG emissions information.

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This action will open the Add/Edit N2O Emissions Information page.

Step 2. Enter N2O Emissions Information

On the Add/Edit N2O Emissions Information page, enter the following information: 

  • Total annual N2O emissions from chemical vapor deposition as calculated in Equation I-10 in the FOR CHEMICAL VAPOR DESPOSITION PROCESSES IN THIS FAB section of the page.
  • Total annual N2O emissions from electronic manufacturing processes as calculated in Equation I-11 in the FOR OTHER ELECTRONICS MANUFACTURING PROCESSES IN THIS FAB section of the page.

Click SAVE.

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Once you have completed entering and saving N2O emissions, click the "F-GHG Emissions" button at the bottom of the page to open the Add/Edit F-GHG Emissions Information page.

Step 3. Enter F-GHG Emissions Information

On the Add/Edit F-GHG Emissions Information page, enter the emissions in metric tons for each of the listed f-GHGs for this fab. Be careful to match the f-GHG emissions being entered to the name and CAS number shown to avoid reporting errors for gases with similar names or CAS numbers.

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Once you have finished entering f-GHG emissions, click SAVE. If you used f-HTFs at this facility, click the "F-HTF Emissions" button at the bottom of the page to open the Add/Edit F-HTF Emissions Information page. If you have no f-HTF emissions to report, click the "Subpart Overview" button to return to the Subpart I Overview page.

Step 4. Enter F-HTF Emissions Information

On the Add/Edit F-HTF Emissions Information page, enter the following information for each f-HTF listed:

  • The total annual emissions in metric tons
  • Indicate whether or not missing data procedures were used to estimate inputs into the fluorinated heat transfer fluid mass balance equation (Equation I-16) under §98.95(b) using the "Yes" or "No" radio buttons.

If you indicated that missing data procedures were used to estimate equation inputs for a f-HTF, e-GGRT will display additional data elements. Enter the following missing data information for the f-HTF:

  • The number of times missing data procedures were followed in this reporting year for the f-HTF
  • The method used to estimate the missing data, selected from the following options in the dropdown:
    • Arithmetic average
    • Supplier records

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Once you have finished entering f-HTF emissions information, click SAVE, then click the "Subpart Overview" button to return to the Subpart I Overview page.

Repeat the above steps to enter GHG emissions data for each fab at the facility.

See Also

Screen Errors
Using e-GGRT to Prepare Your Subpart I Report
Subpart I Abatement System Supplier Documentation
Subpart I Fab Information
Subpart I Greenhouse Gas Emissions Information
Optional Subpart I Calculation Spreadsheet
Subpart Validation Report 


This web site is maintained by a contractor to the U.S. Environmental Protection Agency (RY2023.R.01)