Certain validation checks which are considered critical errors must be corrected before you can successfully generate your submission package or upload your XML-based submission. These checks are presented to the reporter when they attempt to generate or regenerate their submission or after they attempt to upload an XML-based submission. These checks are signified with a stop sign 
in your validation report. The table below provides a list of critical errors. Additional technical information that may assist XML uploaders is also available at XML Upload Critical Errors. If you feel that you have triggered one of these checks in error, or if there’s a reason why your report should be submitted despite the check being triggered, you may submit a request to the e-GGRT Help Desk at GHGReporting@epa.gov.
| CODE | SUBPART | TYPE | MESSAGE_TEXT |
|---|---|---|---|
| I0001 | I | Data Completeness | Please indicate (YES or NO) whether your facility manufactures semiconductors. 98.96(a) This data element is required. (Yes/No) |
| I0002 | I | Data Completeness | Please indicate if the facility manufactures micro-electro-mechanical systems (MEMS), photovoltaic cells (PVs), or liquid crystal displays (LCDs) under §98.96. This data element is required. (Yes/No) |
| I0003 | I | Screen Error | On the Facility Details page of the reporting form, please provide the Annual Manufacturing Capacity of the Facility as Determined by Eq. I-5 (square meters). You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0004 | I | Screen Error | Please indicate the Annual Production in Terms of Substrate Area (square meters). You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0005 | I | Data Completeness | Please indicate (YES or NO) whether your facility manufactures wafers 150 mm in diameter. 98.96(b) |
| I0006 | I | Data Completeness | Please indicate (YES or NO) whether your facility manufactures wafers 200 mm in diameter. 98.96(b) |
| I0007 | I | Data Completeness | Please indicate (YES or NO) whether your facility manufactures wafers 300 mm in diameter. 98.96(b) |
| I0008 | I | Data Completeness | Please indicate (YES or NO) whether your facility manufactures wafers larger than 300 mm in diameter. 98.96(b) |
| I0009 | I | Data Completeness | On the Facility Details page of the reporting form, please report the quantifiable metric used in the engineering model to apportion gas consumption. 98.96(m)(i) |
| I001 | I | Data Completeness | Annual XX mass emissions. This data element is required. |
| I0010 | I | Data Completeness | On the Facility Details page of the reporting form, please enter the start date. 98.96(m)(ii) |
| I0011 | I | Data Completeness | On the Facility Details page of the reporting form, please provide the End Date Selected under §98.94 (c )(2)(i). This data element is required. |
| I0012 | I | Data Completeness | On the Facility Details page of the reporting form, please provide the certification that the gases you selected under §98.94 (c )(2)(ii) correspond to the largest quantities consumed on a mass basis, at your facility in the reporting year for the plasma etching process type and the chamber cleaning process type. This data element is required. |
| I0013 | I | Data Completeness | Please indicate the result of the calculation comparing actual to modeled gas consumption under §98.94(c)(2)(iii). This data element is required. |
| I0014 | I | Data Completeness | Please enter the name of each f-GHG for which you are reporting emissions from PV-MEMS-LCD manufacturing. 98.96(c)(1) |
| I0015 | I | Data Completeness | Please enter the name for each "Other f-GHG" for which emissions are reported from PV-MEMS-LCD manufacturing. 98.96(c)(1) |
| I0016 | I | Data Completeness | Please provide a CAS number for each "other f-GHG" for which you are reporting emissions from PV/ MEMS/LCD manufacturing. 98.96(c)(1) |
| I0017 | I | Data Completeness | Please indicate a response for the process type for each f-GHG for which you are reporting emissions from PV-MEMS-LCD manufacturing. 98.96(c)(1) |
| I0018 | I | Data Completeness | Please indicate a response for the method of emissions calculation for each f-GHG reported from PV/MEMS/LCD manufacturing. 98.96(d) |
| I0019 | I | Data Completeness | Please enter the annual emissions for each of the f-GHG entered in the form for reporting emissions from PV-MEMS-LCD manufacturing. 98.96(c)(1). You must enter a value greater than or equal to zero before continuing. |
| I0020 | I | Data Completeness | Please provide the CAS No. for each F-GHG reported. This data element is required. |
| I0021 | I | Data Completeness | Please enter the name of each f-GHG for which you are reporting emissions from semiconductor manufacturing. 98.96(c)(1) |
| I0022 | I | Data Completeness | Please enter the name for each "Other f-GHG" for which emissions are reported from semiconductor manufacturing. 98.96(c)(1) |
| I0023 | I | Data Completeness | Please enter the CAS Number for each "Other f-GHG" for which you are reporting emissions from semiconductor manufacturing. 98.96(c)(1) |
| I0024 | I | Data Completeness | Please indicate a response for the process type for each f-GHG for which you are reporting emissions from semiconductor manufacturing. 98.96(c)(1) |
| I0025 | I | Data Completeness | Please indicate a response for the method of emissions calculation for each f-GHG reported from semiconductor manufacturing. 98.96(d) |
| I0026 | I | Data Completeness | Please enter a value for the annual emissions for each f-GHG entered in the form for reporting annual emissions from semiconductor manufacturing. 98.96(c)(1). You must enter a value greater than or equal to zero before continuing. |
| I0027 | I | Data Completeness | Please provide the CAS No. for each F-GHG reported. This data element is required. |
| I0028 | I | Data Completeness | Please indicate a response for the certification of whether recipes grouped together as similar are similar. You may indicate that this certification is "not applicable." 98.96(f)(3) |
| I0029 | I | Data Completeness | Please indicate a response for the certification that the measurements for all reported recipe-specific utilization and by-product formation rates were made using the International SEMATECH #06124825A-ENG (incorporated by reference, see §98.7) if measurements were made prior to January 1, 2007. This data element is required. |
| I0030 | I | Data Completeness | Please enter the name or ID of each recipe for which you are reporting recipe-specific emissions. 98.96(c)(2) |
| I0032 | I | Data Completeness | Please indicate a response for the type of recipe (individual or group of similar recipes) for which you are reporting recipe-specific emissions. 98.96(c)(2) |
| I0033 | I | Data Completeness | Please indicate a response for the process type for each f-GHG for which you are reporting recipe-specific emissions. 98.96(c)(2) |
| I0034 | I | Data Completeness | Please indicate the film or substrate etched for each recipe for which recipe-specific emissions are reported. 98.96(f)(2) |
| I0035 | I | Data Completeness | Please enter the "Other" film or substrate etched, or the "Low k" type, as applicable, for each recipe for which recipe specific emissions are reported. 98.96(f)(2) |
| I0036 | I | Data Completeness | Please report the feature types that were etched for each recipe for which recipe-specific emissions were reported. 98.96(f)(2) |
| I0037 | I | Data Completeness | Please select the source of the recipe-specific utilization or by-product formation rate. 98.96(f)(5) |
| I0038 | I | Data Completeness | Please describe the "other" source of the recipe-specific utilization or by-product formation rate. 98.96(f)(5) |
| I0039 | I | Data Completeness | Please enter the name of each f-GHG for which you are reporting recipe-specific emissions. 98.96(c)(2) |
| I004 | I | Screen Error | File size is greater than the maximum of 2 MB. |
| I0040 | I | Data Completeness | Please enter the name for each "Other f-GHG" for which recipe-specific emissions are reported. 98.96(c)(2) |
| I0041 | I | Data Completeness | Please enter the CAS Number for each "Other f-GHG" for which you are reporting recipe-specific emissions. 98.96(c)(2) |
| I0042 | I | Screen Error | Please enter a value for the annual emissions for each f-GHG entered in the form for reporting recipe-specific annual emissions. 98.96(c)(2). You must enter a value greater than or equal to zero before continuing. |
| I0043 | I | Data Completeness | Please provide the CAS No. for each F-GHG reported. This data element is required. |
| I0044 | I | Data Completeness | Please indicate a response for the method of emissions calculation for N2O emissions from the chemical vapor deposition (CVD) process. 98.96(d) |
| I0045 | I | Data Completeness | Please indicate a response for the source of the facility-specific N2O factors for the chemical vapor deposition (CVD) process from the pull down menu. 98.96(f)(5) |
| I0046 | I | Data Completeness | Total Annual N2O Emissions from Chemical Vapor Deposition (metric tons/yr). You must enter a value greater than or equal to zero before continuing. |
| I0047 | I | Data Completeness | Certification that the measurements for all reported facility-specific N2O utilization factors were made using the International SEMATECH #06124825A-ENG (incorporated by reference, see §98.7), or the International SEMATECH #01104197A §98.7) if measurements were made prior to January 1, 2007. This data element is required. |
| I0048 | I | Data Completeness | Certification that the conditions under which the measurements were made for facility-specific N2O utilization factors are representative of your facility\'s CVD N2O-emitting production processes. This data element is required. |
| I0049 | I | Data Completeness | Please indicate a response for the method of calculating N2O emissions for other processes at your facility that use and emit N2O. 98.96(d) |
| I005 | I | Data Completeness | You have not uploaded a reporting form file. |
| I0050 | I | Data Completeness | Please indicate a response for the source of the facility-specific N2O factors for the other N2O using processes from the pull down menu. 98.96(f)(5) |
| I0051 | I | Data Completeness | Total Annual N2O Emissions from all other N2O-using manufacturing processes (metric tons/yr). You must enter a value greater than or equal to zero before continuing. |
| I0052 | I | Data Completeness | Certification that the measurements for all reported facility-specific N2O utilization factors were made using the International SEMATECH #06124825A-ENG (incorporated by reference, see §98.7), or the International SEMATECH #01104197A §98.7) if measurements were made prior to January 1, 2007. This data element is required. |
| I0053 | I | Data Completeness | Certification that the conditions under which the measurements were made for facility-specific N2O utilization factors are representative of your facility\'s "other" N2O emitting production processes. This data element is required. |
| I0054 | I | Data Completeness | Please include the name of each f-HTF for which you are reporting emissions. 98.96(c)(1) |
| I0055 | I | Data Completeness | Please enter the name for each "Other f-HTF" for which emissions are reported. 98.96(c)(4) |
| I0056 | I | Data Completeness | Please enter the CAS Number for each "Other f-HTF" for which emissions are reported. 98.96(c)(1) |
| I0057 | I | Data Completeness | Please indicate a response for the method of emissions calculation for each f-GHG reported from fluorinated heat transfer fluids. 98.96(d) |
| I0058 | I | Screen Error | Please enter a value for the annual emissions for each f-HTF entered in the form for reporting annual emissions. 98.96(c)(4). You must enter a value greater than or equal to zero before continuing. |
| I0059 | I | Data Completeness | Please provide the CAS No. for each F-GHG reported. This data element is required. |
| I0060 | I | Data Completeness | You did not select either Yes or No for the question "Does your facility have any abatement systems through which fluorinated GHGs or N2O flow and which are designed for abatement of fluorinated GHGs or N2O?" on the "7. Abatement Systems" tab of the reporting form. Please select Yes or No to allow e-GGRT to process your form. |
| I0061 | I | Data Completeness | Abatement System or Abatement System Class Name or ID. This data element is required. |
| I0062 | I | Data Completeness | Please indicate the Manufacturer of Abatement System or Abatement System Class. This data element is required. |
| I0063 | I | Data Completeness | Please indicate the Model Number of Abatement System (enter all relevant model numbers if reporting data for a class). This data element is required |
| I0065 | I | Data Completeness | Where the default DRE value is used to report controlled emissions, enter the filename of the attachment uploaded to e-GGRT containing certification that the system was designed for f-GHG and N2O abatement. This data element is required. |
| I0066 | I | Screen Error | The total number of systems for which destruction or removal efficiency was properly measured in the class for the reporting year. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing |
| I0067 | I | Data Completeness | Please describe the "other" calculation method used to determine the average abatement system destruction or removal efficiency for the class. 98.96(q)(5)(iv) |
| I0068 | I | Data Completeness | Please provide a description of the method of randomly selecting class members of abatement systems for testing to determine the class average destruction or removal efficiency. 98.96(q)(5)(v) |
| I0069 | I | Data Completeness | Please indicate the Product Type associated with each abatement system. This data element is required. |
| I0070 | I | Data Completeness | Please indicate a response for the tool type associated with each abatement system. 98.96(p) |
| I0071 | I | Data Completeness | Model Number(s) of Tools Associated with Abatement System. This data element is required. |
| I0072 | I | Data Completeness | Please indicate the process type or sub-type associated with the tool(s) connected to each abatement system. 98.96(p) |
| I0075 | I | Data Completeness | If you are taking credit for abatement system DRE in calculating GHG emissions, please indicate a response for the certification that each abatement system has been installed, maintained, and operated in accordance with manufacturers specifications. This data element is required. |
| I0076 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (1 of 10). This data element is required. |
| I0077 | I | Data Completeness | Specify "Other f-GHG" Name (1 of 10). This data element is required. |
| I0078 | I | Data Completeness | Specify "Other f-GHG" CAS No. (1 of 10). This data element is required. |
| I0079 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (2 of 10) (only if needed). This data element is required. |
| I0080 | I | Data Completeness | Specify "Other f-GHG" Name (2 of 10) (only if needed). This data element is required. |
| I0081 | I | Data Completeness | Specify "Other f-GHG" CAS No. (2 of 10) (only if needed). This data element is required. |
| I0082 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (3 of 10) (only if needed). This data element is required. |
| I0083 | I | Data Completeness | Specify "Other f-GHG" Name (3 of 10) (only if needed). This data element is required. |
| I0084 | I | Data Completeness | Specify "Other f-GHG" CAS No. (3 of 10) (only if needed). This data element is required. |
| I0085 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (4 of 10) (only if needed). This data element is required. |
| I0086 | I | Data Completeness | Specify "Other f-GHG" Name (4 of 10) (only if needed). This data element is required. |
| I0087 | I | Data Completeness | Specify "Other f-GHG" CAS No. (4 of 10) (only if needed). This data element is required. |
| I0088 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (5 of 10) (only if needed). This data element is required. |
| I0089 | I | Data Completeness | Specify "Other f-GHG" Name (5 of 10) (only if needed). This data element is required. |
| I0090 | I | Data Completeness | Specify "Other f-GHG" CAS No. (5 of 10) (only if needed). This data element is required. |
| I0091 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (6 of 10) (only if needed). This data element is required. |
| I0092 | I | Data Completeness | Specify "Other f-GHG" Name (6 of 10) (only if needed). This data element is required. |
| I0093 | I | Data Completeness | Specify "Other f-GHG" CAS No. (6 of 10) (only if needed). This data element is required. |
| I0094 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (7 of 10) (only if needed). This data element is required. |
| I0095 | I | Data Completeness | Specify "Other f-GHG" Name (7 of 10) (only if needed). This data element is required. |
| I0096 | I | Data Completeness | Specify "Other f-GHG" CAS No. (7 of 10) (only if needed). This data element is required. |
| I0097 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (8 of 10) (only if needed). This data element is required. |
| I0098 | I | Data Completeness | Specify "Other f-GHG" Name (8 of 10) (only if needed). This data element is required. |
| I0099 | I | Data Completeness | Specify "Other f-GHG" CAS No. (8 of 10) (only if needed). This data element is required. |
| I0100 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (9 of 10) (only if needed). This data element is required. |
| I0101 | I | Data Completeness | Specify "Other f-GHG" Name (9 of 10) (only if needed). This data element is required. |
| I0102 | I | Data Completeness | Specify "Other f-GHG" CAS No. (9 of 10) (only if needed). This data element is required. |
| I0103 | I | Data Completeness | Name of f-GHG or N2O in the effluent stream (10 of 10) (only if needed). This data element is required. |
| I0104 | I | Data Completeness | Specify "Other f-GHG" Name (10 of 10) (only if needed). This data element is required. |
| I0105 | I | Data Completeness | Specify "Other f-GHG" CAS No. (10 of 10) (only if needed). This data element is required. |
| I0106 | I | Data Completeness | On the Facility Details page of the reporting form, please provide the Annual Manufacturing Capacity of the Facility as Determined by Eq. I-5 (square meters). This data element is required |
| I0108 | I | Data Completeness | Please indicate the Annual Production in Terms of Substrate Area (square meters). This data element is required. |
| I0110 | I | Data Completeness | End Date Selected under §98.94 (c )(2)(i). The end date must occur after the start date. |
| I0111 | I | Data Completeness | Please enter the annual emissions for each of the f-GHG entered in the form for reporting emissions from PV-MEMS-LCD manufacturing. 98.96(c)(1). You must enter a value greater than or equal to zero before continuing. |
| I0112 | I | Data Completeness | Please enter a value for the annual emissions for each f-GHG entered in the form for reporting annual emissions from semiconductor manufacturing. 98.96(c)(1). You must enter a value greater than or equal to zero before continuing. |
| I0119 | I | Screen Error | Please enter a value for the annual emissions for each f-GHG entered in the form for reporting recipe-specific annual emissions. 98.96(c)(2). You must enter a value greater than or equal to zero before continuing. |
| I0120 | I | Screen Error | Please enter a value for the annual emissions for each f-HTF entered in the form for reporting annual emissions. 98.96(c)(4). You must enter a value greater than or equal to zero before continuing. |
| I0122 | I | Data Quality | The total number of systems for which destruction or removal efficiency was properly measured in the class for the reporting year. This data element is required. |
| I0123 | I | Data Completeness | Please enter the chemical formula for each "Other f-GHG" for which emissions are reported from PV-MEMS-LCD manufacturing. 98.96(c)(1) |
| I0124 | I | Data Completeness | Please enter the chemical formula for each "Other f-GHG" for which emissions are reported from semiconductor manufacturing. 98.96(c)(1) |
| I0125 | I | Data Completeness | Please enter the chemical formula for each "Other f-GHG" for which recipe-specific emissions are reported. 98.96(c)(2) |
| I0126 | I | Data Completeness | Please enter the chemical formula for each "Other f-HTF" for which emissions are reported. 98.96(c)(1) |
| I0127 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (1 of 10). This data element is required. |
| I0128 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (2 of 10) (only if needed). This data element is required. |
| I0129 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (3 of 10) (only if needed). This data element is required. |
| I0130 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (4 of 10) (only if needed). This data element is required. |
| I0131 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (5 of 10) (only if needed). This data element is required. |
| I0132 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (6 of 10) (only if needed). This data element is required. |
| I0133 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (7 of 10) (only if needed). This data element is required. |
| I0134 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (8 of 10) (only if needed). This data element is required. |
| I0135 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (9 of 10) (only if needed). This data element is required. |
| I0136 | I | Data Completeness | Specify "Other f-GHG" Chemical Formula (10 of 10) (only if needed). This data element is required. |
| I0145 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (1 of 10). This data element is required. |
| I0147 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (2 of 10) (only if needed). This data element is required. |
| I0149 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (3 of 10) (only if needed). This data element is required. |
| I0151 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (4 of 10) (only if needed). This data element is required. |
| I0153 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (5 of 10) (only if needed). This data element is required. |
| I0155 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (6 of 10) (only if needed). This data element is required. |
| I0157 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (7 of 10) (only if needed). This data element is required. |
| I0159 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (8 of 10) (only if needed). This data element is required. |
| I0161 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (9 of 10) (only if needed). This data element is required. |
| I0163 | I | Data Completeness | Manufacturer Destruction or Removal Efficiency (10 of 10) (only if needed). This data element is required. |
| I0165 | I | Screen Error | Please enter the facility\'s GHGRP ID. This data element is required and must be equal to the GHGRP ID for the facility. |
| I0166 | I | Screen Error | On the Facility Details page of the reporting form, please indicate the Reporting Period. This data element is required and must be equal to the expected reporting year. |
| I0171 | I | Data Completeness | Please select from the pull-down menu the calculation method used to determine the average abatement system destruction or removal efficiency for the class. 98.96(q)(5)(iv) |
| I0185 | I | Data Completeness | Total Annual N2O Emissions from Chemical Vapor Deposition (metric tons/yr). You must enter a value greater than or equal to zero before continuing. |
| I0186 | I | Data Completeness | Total Annual N2O Emissions from all other N2O-using manufacturing processes (metric tons/yr). You must enter a value greater than or equal to zero before continuing. |
| I0191 | I | Data Completeness | The sheet titled \'2. PV|MEMS|LCD f-GHG\' is blank. Please review your reporting form file and ensure you have completed all required reporting on this sheet. |
| I0192 | I | Data Completeness | The sheet titled \'3. Semiconductors f-GHG\' is blank. Please review your reporting form file and ensure you have completed all required reporting on this sheet. |
| I0193 | I | Screen Error | The name/identifier you are trying to add already exists. Please enter a unique name/identifier or click CANCEL. |
| I0194 | I | Screen Error | You must provide a unique name/identifier for each fab. This data element is required. |
| I0195 | I | Screen Error | You cannot add this greenhouse gas because the CAS Registry Number you have provided for this 'other' gas matches with an existing 40 CFR Part 98 Table A-1 gas, or it matches with an 'other' gas that has already been added. It is possible it is included in the selection list provided, but with a different chemical name than the one you are using. The gas with the matching CAS Registry Number is identified within e-GGRT as follows: CAS Registry Number: {1}; Gas Name: {2}; Chemical Formula: {3}. If you would like to select this gas, click CANCEL and locate the gas on the selection list provided. If you are unable to locate this gas on the selection list provided, please <a href=http://www.ccdsupport.com/confluence/display/help/Contact+the+Help+Desk+-+Issues+Related+to+the+Identification+of+Specific+f-GHGs target=_blank>contact the GHGRP Help Desk</a>. |
| I0196 | I | Screen Error | This fluorinated greenhouse gas has already been added for this fab. Please select another gas from the list or click CANCEL. |
| I0197 | I | Screen Error | You have not selected a fluorinated greenhouse gas. Please select a greenhouse gas, or click CANCEL. |
| I0198 | I | Screen Error | You must provide a unique name/identifier for each stack system. This data element is required. |
| I0199 | I | Screen Error | You must provide an abatement system unique name/identifier. This data element is required. |
| I0200 | I | Data Completeness | The basis of the DRE for the abatement system (default DRE or measured DRE) is not identified. This data element is required. |
| I0201 | I | Data Completeness | Annual emissions for this fluorinated greenhouse gas. This data element is required. |
| I0301 | I | Screen Error | Method of reporting N2O emissions from chemical vapor deposition as calculated in Equation I-10. This data element is required. Please enter the required data or click CANCEL. |
| I0302 | I | Data Completeness | Total annual N2O emissions from chemical vapor deposition as calculated in Equation I-10. This data element is required. |
| I0303 | I | Screen Error | Total annual N2O emissions from chemical vapor deposition as calculated in Equation I-10. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0304 | I | Screen Error | Method of reporting N2O emissions from the aggregate of all other electronic manufacturing processes as calculated in Equation I-11. This data element is required. |
| I0305 | I | Data Completeness | Total annual N2O emissions from the aggregate of all other electronic manufacturing processes as calculated in Equation I-11. This data element is required. |
| I0306 | I | Screen Error | Total annual N2O emissions from the aggregate of all other electronic manufacturing processes as calculated in Equation I-11. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0370 | I | Screen Error | F-HTF Name. Please enter the required data or click CANCEL. |
| I0371 | I | Screen Error | Chemical Formula. Please enter the required data or click CANCEL. |
| I0372 | I | Screen Error | Chemical Abstract Registry Number (CAS No.). Please enter the required data or click CANCEL. |
| I0373 | I | Screen Error | Group in Table A-1 to subpart A to which this f-HTF belongs. Please enter the required data or click CANCEL. |
| I0379 | I | Screen Error | You have not selected a fluorinated heat transfer fluid. Please select a fluorinated heat transfer fluid, or click CANCEL. |
| I0380 | I | Data Completeness | You must indicate if missing data procedures were used to estimate inputs into the fluorinated heat transfer fluid mass balance equation. This data element is required. |
| I0381 | I | Data Completeness | How many times were missing data procedures followed in this reporting year for F-HTF [{1}]. This data element is required. |
| I0382 | I | Screen Error | Number of times missing data procedures were followed in this reporting year for F-HTF [{1}]. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0383 | I | Data Completeness | Method used to estimate the missing data for F-HTF [{1}]. This data element is required. |
| I0384 | I | Screen Error | Made one or more selections in the pick list and selected option to add an unlisted gas. If adding an unlisted gas, do not make selections in the pick list. Selections from previous sessions can be left alone. |
| I0386 | I | Screen Error | F-HTF Name. This data element is required. Please enter the required data or click CANCEL. |
| I0387 | I | Screen Error | Chemical Formula. This data element is required. Please enter the required data or click CANCEL. |
| I0388 | I | Screen Error | CAS Number. This data element is required. Please enter the required data or click CANCEL. |
| I0389 | I | Screen Error | GHG Group. This data element is required. Please enter the required data or click CANCEL. |
| I0390 | I | Data Completeness | Total Annual Emissions for F-HTF [{1}]. This data element is required. |
| I0391 | I | Screen Error | Total Annual Emissions for F-HTF [{1}]. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0400 | I | Data Completeness | Optional Description. This data element is required. |
| I0401 | I | Screen Error | What does the fab manufacture? Please enter the required data or click CANCEL. |
| I0402 | I | Screen Error | Method used to calculate f-GHG emissions for this fab from the plasma etch/wafer clean and chamber clean process types. Please enter the required data or click CANCEL. |
| I0403 | I | Screen Error | Does the fab have abatement systems (as defined in 98.98) through which F-GHG or N2O flow? Please enter the required data or click CANCEL. |
| I0404 | I | Screen Error | Is the fab claiming destruction or removal efficiency for those abatement systems (as defined in 98.98) at the fab? Please enter the required data or click CANCEL. |
| I0405 | I | Data Completeness | You have added a fab, but have not yet selected a fluorinated greenhouse gas. At least one fluorinated greenhouse gas must be selected. |
| I0406 | I | Data Completeness | You have added a fab, but have not yet selected a fluorinated greenhouse gas. At least one fluorinated greenhouse gas must be selected. |
| I0407 | I | Data Completeness | You have added a fab and indicated that it has an abatement system through which a F-GHG or N2O flows, but have not yet added an abatement system. At least one abatement system should be added. |
| I0408 | I | Data Completeness | You have added a fab and indicated that it has an abatement system through which a F-GHG or N2O flows, but have not yet added an abatement system. At least one abatement system should be added. |
| I0409 | I | Data Completeness | List the Specific Wafer Size(s) Less than 150mm Manufactured at this Fab. This data element is required. |
| I0410 | I | Data Completeness | Annual Manufacturing Capacity at this Fab used in Equation I-5. This data element is required. |
| I0411 | I | Data Completeness | Annual production for this fab in terms of substrate surface area (e.g., silicon, PV-cell, glass). This data element is required. |
| I0412 | I | Data Completeness | Do the emissions for this fab include emissions from research and development activities, as defined in 98.6? This data element is required. |
| I0413 | I | Data Completeness | Report the estimated percentage of emissions that are from Research and Development activities. This data element is required. |
| I0414 | I | Data Completeness | You must report the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate. This data element is required. |
| I0415 | I | Data Completeness | You must report the method used for this fab to develop the apportioning factors for fluorinated GHG and N2O consumption. This data element is required. |
| I0416 | I | Data Completeness | Optional description of your system and method(s) used in the fab-specific apportioning model. This data element is required. |
| I0417 | I | Data Completeness | Description of quantifiable metric used in engineering model to apportion gas consumption. This data element is required. |
| I0418 | I | Data Completeness | Start date for apportioning model verification period selected under 98.94(c)(2)(i). This data element is required. |
| I0419 | I | Data Completeness | End date for apportioning model verification period selected under 98.94(c)(2)(i). This data element is required. |
| I0420 | I | Data Completeness | Certification that the gas(es) selected under 98.94(c)(2)(ii) for this fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at the fab in the reporting year which the facility is required to apportion. This data element is required. |
| I0421 | I | Data Completeness | Result of calculation comparing actual and modeled gas consumption under §98.94(c)(2)(v). This data element is required. |
| I0422 | I | Data Completeness | If you are required to apportion f-GHG consumption between fabs, as required by 98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) correspond(s) to the largest quantities consumed on a mass basis, of f-GHG used at your facility during the reporting year for which you are required to apportion. This data element is required. |
| I0423 | I | Data Completeness | For all stack systems for which you calculate fluorinated GHG emissions according to the procedures specified in § 98.93(i)(3), certification that you have included and accounted for all abatement systems and any respective downtime in your emissions calculations. This data element is required. |
| I0424 | I | Data Completeness | Certification that no more than 10 percent of the total number of fluorinated GHG emitting process tools were connected or disconnected from any one stack system during any testing in this fab during the reporting year. This data element is required. |
| I0425 | I | Data Completeness | Certification that no process tools in this fab that were in operation at the start of the test period were moved to a different stack system during the test period (i.e., during or in-between testing of individual stack systems). This data element is required. |
| I0426 | I | Data Completeness | Certification that no point-of-use abatement systems were permanently removed from service during the test period. This data element is required. |
| I0427 | I | Data Completeness | You have added a fab and indicated the Stack Testing Method was used to calculate f-GHG emissions, but have not yet added a stack system. At least one stack system should be added. |
| I0428 | I | Data Completeness | You have added a fab and indicated the Stack Testing Method was used to calculate f-GHG emissions, but have not yet added a stack system. At least one stack system should be added. |
| I0429 | I | Screen Error | F-GHG Name. Please enter the required data or click CANCEL. |
| I0430 | I | Screen Error | Chemical Formula. Please enter the required data or click CANCEL. |
| I0431 | I | Screen Error | Chemical Abstract Registry Number (CAS No.). Please enter the required data or click CANCEL. |
| I0432 | I | Screen Error | Group in Table A-1 to subpart A to which this f-GHG belongs. Please enter the required data or click CANCEL. |
| I0433 | I | Data Completeness | You must provide certification that the site maintenance plan for abatement systems for which emissions are being reported contains manufacturers recommendations and specifications for installation, operation, and maintenance for each abatement system. This data element is required. |
| I0434 | I | Data Completeness | Certification that the abatement systems for which emissions are being reported and for which default DRE are being used were specifically designed for fluorinated GHG and N2O abatement, as applicable. This data element is required. |
| I0435 | I | Data Completeness | Supplier documentation that indicates that the system is designed to abate F-GHG or N2O, if using the applicable default DRE for this gas and process combination. This data element is required. |
| I0436 | I | Data Completeness | An indication is required that stack testing on this stack system was performed, not performed, or not required. This data element is required. |
| I0437 | I | Data Completeness | Date(s) of any testing conducted during the reporting year for this stack system [98.96(w)(1)]. This data element is required. |
| I0438 | I | Data Completeness | Indicate why stack testing was not performed. This data element is required. |
| I0439 | I | Data Quality | Effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate [98.96(r)]. If you are using the default emission factor method and are claiming abatement, you cannot enter a value equal to 0. You must correct the current value before continuing. |
| I0440 | I | Data Quality | Effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate [98.96(r)]. If you are using the stack test method and are claiming abatement, you cannot enter a value equal to 0. You must correct the current value before continuing. |
| I0442 | I | Data Completeness | You have added an abatement system but have not yet selected a f-GHG and process type/sub-type combination for which DRE is being claimed. Please make a f-GHG and process type/sub-type combination selection. |
| I0500 | I | Screen Error | Please select at least one process type and/or method of emissions calculation. Please enter the required data or click CANCEL. |
| I0500-1 | I | Screen Error | Please select at least one process type and/or method of emissions calculation. Please enter the required data or click CANCEL. |
| I0500-2 | I | Screen Error | Please select at least one process type and/or method of emissions calculation. Please enter the required data or click CANCEL. |
| I0602 | I | Screen Error | Total Annual Emissions for F-HTF [{1}]. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0603 | I | Data Completeness | Certification that all abatement systems at the facility have been installed, maintained, and operated in accordance with the site maintenance plan for abatement systems that is developed and maintained in your records as specified in 98.97(d)(9). [§98.96(q)]. This data element is required. |
| I0604 | I | Screen Error | Number of Abatement Systems. This data element is required and cannot be zero. |
| I0605 | I | Screen Error | What is the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate? [§98.96(r)] You must enter a value that is greater than or equal to zero and less than or equal to one. You must correct the current value before continuing. |
| I0606 | I | Data Completeness | What is the diameter of the wafers manufactured at this fab? This data element is required. Please select all wafer diameters that apply; you must select at least one wafer diameter. |
| I0608 | I | Screen Error | You have selected "Used default factors" as the method of emission calculation for an "other" F-GHG that is not on the F-GHG pick list and for which no default emission factor exists. Please select, as appropriate, "Assumed utilization/by-product formation rates = 0" or "Assumed emissions are equal to consumption if annual usage is less than 50 kg." |
| I0608-1 | I | Screen Error | You have selected "Used default factors" as the method of emission calculation for an "other" F-GHG that is not on the F-GHG pick list and for which no default emission factor exists. Please select, as appropriate, "Assumed utilization/by-product formation rates = 0" or "Assumed emissions are equal to consumption if annual usage is less than 50 kg." |
| I0608-2 | I | Screen Error | You have selected "Used default factors" as the method of emission calculation for an "other" F-GHG that is not on the F-GHG pick list and for which no default emission factor exists. Please select, as appropriate, "Assumed utilization/by-product formation rates = 0" or "Assumed emissions are equal to consumption if annual usage is less than 50 kg." |
| I0609 | I | Screen Error | The unique name/identifier for the fab. This data element cannot exceed 40 characters. |
| I0612 | I | Data Quality | You selected "Assumed emissions are equal to consumption if annual usage is less than 50 kg" as a method of emission calculation. However, the reported Annual Emissions of this F-GHG is greater than 50 kg. Please check your selected method of emissions and Annual Emissions and correct before continuing. |
| I0613 | I | Data Quality | You selected "Assumed that emissions are equal to consumption if annual usage is less than 50 kg" as the Method of reporting N2O emissions from chemical vapor deposition. However, the Total annual N2O emissions from chemical vapor deposition is greater than 50 kg. Please check your selected method of emissions and Annual Emissions and correct before continuing. |
| I0614 | I | Data Quality | You selected "Assumed that emissions are equal to consumption if annual usage is less than 50 kg" as the Method of reporting N2O emissions from electronic manufacturing processes. However, the Total annual N2O emissions from electronic manufacturing processes is greater than 50 kg. Please check your selected method of emissions and Annual Emissions and correct before continuing. |
| I0629 | I | Screen Error | Substrate Type. This data element is required. Please make a selection or click CANCEL. |
| I0630 | I | Screen Error | Other Substrate Type (specify) is a required field when "other" is selected as the substrate type. Please enter a value or click CANCEL. |
| I0631 | I | Screen Error | Annual Production of this Substrate in Terms of Surface Area (square meters). This data element is required. Please enter a value or click CANCEL. |
| I0632 | I | Screen Error | Annual Production of this Substrate in Terms of Surface Area (square meters). You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| I0635 | I | Data Completeness | Substrate Type. You have not yet added at least one substrate type for this fab. |
| I0648 | I | Screen Error | Substrate Type. You may only enter a Substrate Type to a fab once, with the exception of the "other" type. Please select a different Substrate Type or click the CANCEL button to return to the Fab Information screen. |
| I404 | I | Data Completeness | You have selected Subpart I for reporting, but you have not yet uploaded a reporting form file. |
| I405 | I | Data Completeness | You have selected Subpart I for reporting, but you have not yet uploaded a DRE certification file. |
| I406 | I | Data Completeness | You have not uploaded a triennial report. Facilities that emitted more than 40,000 metric tons CO2e of GHGs in {1} from the electronics manufacturing processes subject to reporting under subpart I are required to submit a Triennial Report along with their RY {2} report. |
| I601 | I | Data Completeness | You have selected Subpart I for reporting, but you have not yet added a fab. |
| IVT- | I | Screen Error | Temperature of the delayed coking unit vessel overhead line measured as near the coking unit vessel as practical just prior to venting to the atmosphere. You must enter a value that is greater than or equal to zero. You must correct the current value before continuing. |
| IXXX | I | Screen Error | TBD |
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