Reported emissions from the Electronics Manufacturing sector decreased from 7.0 million metric tons (MMT) CO₂e in 2011 to 5.8 9 MMT CO₂e in 20192020, a decrease of 1715.1 7 percent. Emissions decreased 25.7 percent from 2011 to 2013, due primarily to a large reduction in combustion emissions at one plant. Emissions increased after 2013, due in part to a rule revision that changed the emission factors used by facilities to estimate emissions, resulting in higher estimated emissions. The increasing complexity of semiconductor products (necessitating an increase in the use of fluorinated GHGs in the manufacturing process) may have also contributed to the increase in reported emissions between 2013 and 2014.

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Reported emissions in 2019 dropped by almost 8 6.3 percent to 5.8 9 MMT CO₂e, the lowest reported emissions since the subpart I emission factors were updated in 2013. The decrease in emissions in 2019 is due in part to changes in manufacturing processes and , decreases in gas consumption at some facilities, and increased use of abatement. Emissions then remained stable from 2019 to 2020.